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Tetrakis(dimethylamino)titanium TDMAT 四(二甲氨基)鈦(IV)

規格: 99.5+%(99.9999%-Ti)
CAS: 3275-24-9
產品編號: H89647
MDL: MFCD00014861
品牌: INFI

ALD簡介

   原子層沉積技術(Atomic Layer Deposition，簡稱ALD)是一種在納米尺度上進行薄膜沉積的先進技術。通過將物質以單原子形式一層一層的鍍在基底表面，擁有優異的三維共形性、大面積成膜的均勻性和精確控制膜厚等特點。

ALD應用

ALD在能源領域應用

2009年，Miyaska課題組將鈣鈦礦材料MAPbI3用作燃料敏化太陽能電池的光伏活性層，正式開啟了鈣鈦礦太陽能電池的新紀元。ALD憑借其均勻成膜性、精準控制厚度和保形性等多種優勢，在光伏領域中發揮著重要作用。除此之外，ALD技術還可用于鋰電池薄膜涂層，提高電池性能。

ALD在泛半導體應用

隨著泛半導體行業的發展，對微型化和集成化要求越來越高，尺寸縮小至亞微米和納米量級，ALD作為一種高精度薄膜沉積技術，可用于晶體管柵極電介質層(高K材料)、金屬柵電極、有機發光顯示器涂層、銅互聯擴散阻擋層、DRAM電介質層、微流體和MEMS涂層、傳感器等眾多領域。

ALD在光學領域應用

由于 ALD 具有的三維共形沉積和大面積均勻性特點，已成功應用于高質量光學薄膜、增透膜、折射率可調的光學薄膜、波狀多層膜，改善了光子晶體的光學性質和可控性，增加了光子晶體在未來光學器件中的應用潛力。

 公司致力于ALD高純半導體薄膜前驅體材料的自主研發和生產，成立以來，已陸續向多家半導體客戶提供了百余種前驅體新材料，包括高純硅基前驅體系列、High-k前驅體系列產品，部分新品已被客戶用于5nm以下制程薄膜設備。我們致力為客戶提供優質的產品并建立互信、長久的合作關系，產品具有自主知識產權且原材料國產化，打破國外壟斷的同時保證供應鏈的安全。研峰科技愿與國內芯片、高端顯示、光伏新能源等高端客戶一起攜手，解決高端半導體材料的把脖子難題，早日實現進口替代。




Chemical NameTetrakis(Dimethylamino)Titanium
Synonym Tetrakis(dimethylamino)titanium, 96% , C 44.5%, H 10.8%, Ti 26.99-29.23% TETRAKIS(DIMETHYLAMINO)TITANIUM TETRAKIS(DIMETHYLAMINO)TITANIUM, 99.999% Titantetrakis(dimethylammonium) Titanium, tetrakis(dimethylamino)- 二甲基氨基鈦(IV) {uni_hambur Tetrakis(dimethylamino)titanium, 99.99% n-methyl-methanamintitanium(4+)salt Tetrakis(dimethylamino)titanium,99%TDMAT Titanium tetrakis(dimethylamide); Tetrakis(dimethylamino)titanium TDMAT 四(二甲基氨基)鈦(IV) TETRAKIS(DIMETHYLAMIDO)TITANIUM(IV), FOR titanium dimethylamide Tetrakis(dimethylamino)titanium(IV) {JN TITANIUM(IV) DIMETHYLAMIDE 四次二甲基銨基鈦 tetrakis(dimethylamino)titanium 四(二甲基氨基)鈦(IV) Titanium(IV) dimethylamide, 99.95%
PubChem Substance ID123185
EC Number221-904-3
Reaxys-RN3618377
Beilstein Registry Number4(4)128
Chemical Name Translation四(二甲胺基)鈦
InChIKeyMNWRORMXBIWXCI-UHFFFAOYSA-N
LabNetwork Molecule IDLN01253381
CAS Number3275-24-9
MDL NumberMFCD00014861
InChIInChI=1S/4C2H6N.Ti/c4*1-3-2;/h4*1-2H3;/q4*-1;+4
GHS Symbol
WGK Germany3
Hazard Codes F,C,Xi F,C
Hazard statements
  • H225 Highly flammable liquid and vapour 高度易燃液體和蒸氣
  • H260 In contact with water releases flammable gases which may ignite spontaneously 與水接觸時釋放可燃氣體，可自燃。
  • H302 Harmful if swallowed 吞食有害
  • H314 Causes severe skin burns and eye damage 導致嚴重的皮膚灼傷和眼睛損傷
  • H331 Toxic if inhaled 吸入中毒
    Personal Protective Equipment Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter
    Precautionary statements
    • P210 Keep away from heat/sparks/open flames/hot surfaces. — No smoking. 遠離熱源/火花/明火/熱的表面。——禁止吸煙。
    • P223 Keep away from any possible contact with water, because of violent reaction and possible flash fire. 遠離任何與水接觸的可能，因為會劇烈反應可能產生閃火。
    • P231+P232
    • P233 Keep container tightly closed. ?保持容器密閉。
    • P240 Ground/bond container and receiving equipment. 與地面接觸/連接集裝箱和接受設備。
    • P241 Use explosion-proof electrical/ventilating/lighting/…/equipment. 使用防爆電氣/通風/照明/ .../設備。
    • P242 Use only non-sparking tools. 只能使用無火花工具。
    • P243 Take precautionary measures against static discharge. 采取預防措施，防止靜電放電。
    • P260 Do not breathe dust/fume/gas/mist/vapours/spray. 不要吸入粉塵/煙/氣體/煙霧/蒸汽/噴霧。
    • P261 Avoid breathing dust/fume/gas/mist/vapours/spray. 避免吸入粉塵/煙/氣體/煙霧/蒸汽/噴霧。
    • P264 Wash hands thoroughly after handling. 處理后要徹底洗凈雙手。
    • P270 Do not eat, drink or smoke when using this product. 使用本產品時不要吃東西，喝水或吸煙。
    • P271 Use only outdoors or in a well-ventilated area.? 只能在室外或通風良好的地方使用。
    • P280 Wear protective gloves/protective clothing/eye protection/face protection. 戴防護手套/防護服/眼睛的保護物/面部保護物。
    • P301+P312
    • P301+P330+P331
    • P303+P361+P353
    • P304+P340
    • P305+P351+P338
    • P305+P351+P338+P310
    • P310 Immediately call a POISON CENTER or doctor/physician. 立即呼救解毒中心或醫生/醫師。
    • P311 Call a POISON CENTER or doctor/physician. 呼叫解毒中心或醫生/醫師。
    • P321 Specific treatment (see … on this label). 具體治療（見本標簽上的）。
    • P330 Rinse mouth. 漱口
    • P335+P334
    • P363 Wash contaminated clothing before reuse. 被污染的衣服洗凈后方可重新使用。
    • P370+P378
    • P402+P404
    • P403+P233
    • P403+P235
    • P405 Store locked up. 上鎖保管。
    • P422 Store contents under… 存儲目錄在…之下。
    • P501 Dispose of contents/container to..… 處理內容物/容器.....
      Signal word
      UN Number UN3129 3398 3399
      Safety Statements
      • S36/37/39 Wear suitable protective clothing, gloves and eye/face protection 穿戴適當的防護服、手套和眼睛/面保護；
      • S26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice 眼睛接觸后，立即用大量水沖洗并征求醫生意見；
      • S16 Keep away from sources of ignition - No smoking 遠離火源，禁止吸煙；
      • S45 In case of accident or if you feel unwell seek medical advice immediately (show the label where possible) 發生事故時或感覺不適時，立即求醫（可能時出示標簽）；
      • S43 In case of fire use ... (indicate in the space the precise type of fire-fighting equipment. If water increases the risk add -?Never use water) 著火時使用（指明具體的消防器材種類，如果用水增加危險，注明“禁止用水”
        Risk Statements
        • R34 Causes burns 會導致灼傷
        • R14 Reacts violently with water 遇水會猛烈反應
        • R11 Highly flammable 非常易燃
          Storage condition Moisture Sensitive Flammables area
          Packing GroupII
          Hazard Class4.3/3
          Restrict 危險品
        • {SA}
        • 1. J. Appl. Phys. 102 , 083521/1, (2007)
        • {uni_hamburg} Short: II/25D
        • Title: Structure Data of Free Polyatomic Molecules: Molecules Containing Five or More Carbon Atoms
        • Author: Graner, G.; Hirota, E.; Iijima, T.; Kuchitsu, K.; Ramsay, D.A.; Vogt, J.; Vogt, N.
        • Editor: Kuchitsu, K.
        • Source: Landolt-B?rnstein, New Series
        • Volume: II/25D
        • Year: 2003
        • Keyword: Free Polyatomic Molecules; Carbon Atoms; Molecules
        • ISBN: 3-540-42860-7
        • ISBN: 978-3-540-42860-2
        • Internet Resource: DOI:10.1007/b75952
        • RefComment: VIII, 569 pages. Hardcover
        • RefComment: Written for scientists and researchers in the fields of chemistry and physics
        • Abstract: This fourth subvolume presents data on the geometric parameters (internuclear distances, bond angles, dihedral angles of internal rotation etc) of free polyatomic molecules including free radicals and molecular ions. The survey on structure data consists of four subvolumes, each containing the geometric parameters determined in the gas phase either by an analysis of the rotational constants (and sometimes the vibrational constants) obtained from microwave, infrared, Raman, electronic and photoelectron spectroscopy or by an analysis of electron diffraction intensities. Most of the structures listed in the tables are for molecules in the electronic ground state, but structures for electronically excited states have also been included as far as they are available. In this fourth subvolume, the structure of molecules containing five to sixty carbon atoms is listed.
        • {uni_hamburg} Short: EINECS
        • Title: EINECS (European Inventory of Existing Commercial Chemical Substances)
        • Source: Official Journal of the European Communities
        • Volume: C 146 A (15.06.1990)
        • Page: 1
        • Year: 1990
        • Internet Resource: //ecb.jrc.ec.europa.eu/esis/index.php?PGM=ein
        • Publish_Date: 1990/06/15
          • 3275-24-9 H89647 Tetrakis(dimethylamino)titanium TDMAT 四(二甲氨基)鈦(IV)

          化學屬性

          TSCAYes
          Melting Point<4°C
          Mol. FormulaTi[N(CH3)2]4
          Appearance yellow to orange liq.
          Mol. Weight224
          Stabilitymoisture sensitive
          Density0.96
          Flash Point-22°F
          Boiling Point50°C/0.5 mm
          Danger-Level-
          pH-:-
          Redox-

          *以上化合物性質及應用等信息僅供參考