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Tantalum(V) ethoxide 乙醇鉭(V)

規格: 99%(99.999%-Ta)
CAS: 6074-84-6
產品編號: H95353
MDL: MFCD00049785
品牌: INFI

ALD簡介

   原子層(ceng)沉(chen)積技術(Atomic Layer Deposition，簡稱ALD)是一種在納米尺度上(shang)進行(xing)薄膜沉積的先進技術。通過將物質以單原子形式一層一層的鍍在基底表面，擁有優異的三維共形性、大面積成膜的均勻性和精確控制膜厚等特點。

ALD應用

ALD在能源領域應用

2009年，Miyaska課(ke)題組(zu)將鈣(gai)鈦(tai)礦(kuang)材(cai)料(liao)MAPbI3用(yong)作燃料(liao)敏化太陽(yang)能(neng)電(dian)池(chi)的光伏活性層，正(zheng)式開啟了鈣(gai)鈦(tai)礦(kuang)太陽(yang)能(neng)電(dian)池(chi)的新紀元。ALD憑(ping)借其均勻(yun)成(cheng)膜(mo)性、精(jing)準控制厚度和保(bao)形性等多種優勢，在(zai)光伏領域中發揮(hui)著重要(yao)作用(yong)。除此之(zhi)外(wai)，ALD技術還可用(yong)于鋰電(dian)池(chi)薄膜(mo)涂層，提(ti)高(gao)電(dian)池(chi)性能(neng)。

ALD在(zai)泛(fan)半導體應用

隨著泛半導體(ti)行業的發(fa)展，對微(wei)(wei)型化和集成化要(yao)求越來越高，尺寸縮小至亞微(wei)(wei)米和納米量級，ALD作為一種高精度薄(bo)膜(mo)沉積(ji)技術(shu)，可用于(yu)晶體管柵極(ji)電(dian)介質層(ceng)(ceng)(ceng)(高K材料)、金(jin)屬(shu)柵電(dian)極(ji)、有機(ji)發光顯示器涂(tu)層(ceng)(ceng)(ceng)、銅(tong)互聯擴散(san)阻擋層(ceng)(ceng)(ceng)、DRAM電(dian)介質層(ceng)(ceng)(ceng)、微流體和MEMS涂(tu)層(ceng)(ceng)(ceng)、傳(chuan)感器等眾(zhong)多領域。

ALD在(zai)光學領域應用

由于(yu) ALD 具有的(de)(de)三(san)維共形沉(chen)積和(he)大面積均勻性(xing)特(te)點，已成功應用于高質量光(guang)學(xue)(xue)薄膜(mo)、增(zeng)透膜(mo)、折(zhe)射(she)率可(ke)調的(de)(de)光(guang)學(xue)(xue)薄膜(mo)、波狀多層(ceng)膜(mo)，改善(shan)了光(guang)子晶體的(de)(de)光(guang)學(xue)(xue)性(xing)質和(he)可(ke)控性(xing)，增(zeng)加(jia)了光(guang)子晶體在未來光(guang)學(xue)(xue)器件中的(de)(de)應用潛力。

 公司致力于ALD高(gao)純半(ban)(ban)導體(ti)(ti)(ti)薄(bo)膜前(qian)(qian)驅(qu)(qu)體(ti)(ti)(ti)材料(liao)(liao)的自主研(yan)發(fa)和(he)生(sheng)產(chan)，成立(li)以(yi)來，已陸(lu)續向多家半(ban)(ban)導體(ti)(ti)(ti)客戶提供了百余種前(qian)(qian)驅(qu)(qu)體(ti)(ti)(ti)新材料(liao)(liao)，包括高(gao)純硅基前(qian)(qian)驅(qu)(qu)體(ti)(ti)(ti)系(xi)列、High-k前(qian)(qian)驅(qu)(qu)體(ti)(ti)(ti)系(xi)列產(chan)品(pin)，部分新品(pin)已被客戶用于5nm以(yi)下(xia)制程薄(bo)膜設備。我們致力為客戶提供優質的產(chan)品(pin)并建立(li)互信(xin)、長久的合作關(guan)系(xi)，產(chan)品(pin)具有自主知識(shi)產(chan)權(quan)且原材料(liao)(liao)國(guo)產(chan)化，打破國(guo)外(wai)壟斷的同時保證(zheng)供應鏈的安全。研(yan)峰(feng)科技(ji)愿(yuan)與國(guo)內芯片、高(gao)端顯示、光伏新能(neng)源(yuan)等高(gao)端客戶一起攜(xie)手，解決高(gao)端半(ban)(ban)導體(ti)(ti)(ti)材料(liao)(liao)的把脖子難(nan)題，早(zao)日實(shi)現(xian)進(jin)口替代。




Chemical NameTantalum(V) ethoxide
PubChem Substance ID160806
EC Number228-010-2
Beilstein Registry Number3678999
Synonym Tantalum(V) Ethoxide (Metals Basis), Nb {LY} Tantalum(V) Ethoxide (Metals Basis), Nb {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb {} {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb {} {} {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb {} {} {} {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb {} {} {} {} {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb {} {} {} {} {} {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb {} {} {} {} {} {} {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb {} {} {} {} {} {} {} {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb {} {} {} {} {} {} {} {} {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb {} {} {} {} {} {} {} {} {} {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb {} {} {} {} {} {} {} {} {} {} {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb {} {} {} {} {} {} {} {} {} {} {} {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb {} {} {} {} {} {} {} {} {} {} {} {} {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb {} {} {} {} {} {} {} {} {} {} {} {}
Chemical Name Translation乙醇鉭(V)
InChIKeyHSXKFDGTKKAEHL-UHFFFAOYSA-N
MDL NumberMFCD00049785
CAS Number6074-84-6
InChIInChI=1S/5C2H5O.Ta/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5
Canonical SMILES[C2H6O.1/5Ta]
GHS Symbol
WGK Germany1
Hazard statements
  • H226 Flammable liquid and vapour 易燃液體和蒸氣
  • H314 Causes severe skin burns and eye damage 導致嚴重的皮膚灼傷和眼睛損傷
  • H319 Causes serious eye irritation 嚴重刺激眼睛
  • H335 May cause respiratory irritation 可能導致呼吸道刺激
    Personal Protective Equipment Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter
    Hazard Codes C C,F C;F
    Precautionary statements
    • P210 Keep away from heat/sparks/open flames/hot surfaces. — No smoking. 遠離熱源/火花/明火/熱的表面。——禁止吸煙。
    • P233 Keep container tightly closed. ?保持容器密閉。
    • P240 Ground/bond container and receiving equipment. 與地面接觸/連接集裝箱和接受設備。
    • P241 Use explosion-proof electrical/ventilating/lighting/…/equipment. 使用防爆電氣/通風/照明/ .../設備。
    • P242 Use only non-sparking tools. 只能使用無火花工具。
    • P243 Take precautionary measures against static discharge. 采取預防措施，防止靜電放電。
    • P260 Do not breathe dust/fume/gas/mist/vapours/spray. 不要吸入粉塵/煙/氣體/煙霧/蒸汽/噴霧。
    • P261 Avoid breathing dust/fume/gas/mist/vapours/spray. 避免吸入粉塵/煙/氣體/煙霧/蒸汽/噴霧。
    • P264 Wash hands thoroughly after handling. 處理后要徹底洗凈雙手。
    • P271 Use only outdoors or in a well-ventilated area.? 只能在室外或通風良好的地方使用。
    • P280 Wear protective gloves/protective clothing/eye protection/face protection. 戴防護手套/防護服/眼睛的保護物/面部保護物。
    • P301+P330+P331
    • P303+P361+P353
    • P304+P340
    • P305+P351+P338
    • P310 Immediately call a POISON CENTER or doctor/physician. 立即呼救解毒中心或醫生/醫師。
    • P312 Call a POISON CENTER or doctor/physician if you feel unwell. 如果你感覺不適，呼叫解毒中心或醫生/醫師。
    • P321 Specific treatment (see … on this label). 具體治療（見本標簽上的）。
    • P337+P313
    • P363 Wash contaminated clothing before reuse. 被污染的衣服洗凈后方可重新使用。
    • P370+P378
    • P403+P233
    • P403+P235
    • P405 Store locked up. 上鎖保管。
    • P501 Dispose of contents/container to..… 處理內容物/容器.....
      Signal word Danger
      UN Number 2920 UN2924 UN 2920 8/PG 2
      Risk Statements
      • R10 Flammable 易燃
      • R34 Causes burns 會導致灼傷
        Safety Statements
        • S26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice 眼睛接觸后，立即用大量水沖洗并征求醫生意見；
        • S36/37/39 Wear suitable protective clothing, gloves and eye/face protection 穿戴適當的防護服、手套和眼睛/面保護；
        • S45 In case of accident or if you feel unwell seek medical advice immediately (show the label where possible) 發生事故時或感覺不適時，立即求醫（可能時出示標簽）；
        • S16 Keep away from sources of ignition - No smoking 遠離火源，禁止吸煙；
        • S20 When using do not eat or drink 使用時，不得進食，飲水；
        • S23 Do not breathe gas/fumes/vapour/spray (appropriate wording to be specified by the manufacturer) 不要吸入氣體/煙霧/蒸汽/噴霧；
        • S60 This material and its container must be disposed of as hazardous waste 該物質及其容器必須作為危險廢物處置；
          Storage condition Store at room temperature, keep dry and cool {LY} Store at room temperature, keep dry and cool {} {LY} Store at room temperature, keep dry and cool {} {} {LY} Store at room temperature, keep dry and cool {} {} {} {LY} Store at room temperature, keep dry and cool {} {} {} {} {LY} Store at room temperature, keep dry and cool {} {} {} {} {} {LY} Store at room temperature, keep dry and cool {} {} {} {} {} {} {LY} Store at room temperature, keep dry and cool {} {} {} {} {} {} {} {LY} Store at room temperature, keep dry and cool {} {} {} {} {} {} {} {} {LY} Store at room temperature, keep dry and cool {} {} {} {} {} {} {} {} {} {LY} Store at room temperature, keep dry and cool {} {} {} {} {} {} {} {} {} {} {LY} Store at room temperature, keep dry and cool {} {} {} {} {} {} {} {} {} {} {} {LY} Store at room temperature, keep dry and cool {} {} {} {} {} {} {} {} {} {} {} {} {LY} Store at room temperature, keep dry and cool {} {} {} {} {} {} {} {} {} {} {} {} {} {LY} Store
          Packing GroupIII
          Hazard Class3
          Restrict 危險品
        • {SA}
        • Ritala, M.; et al. Science 288 , 319, (2000) 摘要
        • {SA}
        • {SA} Zhang, J-Y.; et al. Appl. Phys. Lett. 73 , 2299, (1998)
        • {SA}
        • Salm,; L. D.; et al. Chem. Vap. Deposition 15 , 221, (2009)
        • {SA}
        • Beil. 1 ,IV,1312
        • {SA}
        • FT-IR 2 (3), 4489:D / FT-NMR 1 (3), 744:A / RegBook 1 (2), 3055:I / Structure Index 1 , 484:D:4
        • {uni_hamburg} Short: IV/20B
        • Title: Vapor Pressure and Antoine Coefficients for Oxygen Containing Organic Compounds
        • Author: Dykyj, J.; Svoboda, J.; Wilhoit, R.C.; Frenkel, M.; Hall, K.R.
        • Editor: Hall, K.R.
        • Source: Landolt-B?rnstein, New Series
        • Volume: IV/20B
        • Year: 2000
        • Keyword: organic compounds; vapor pressure
        • ISBN: 3-540-64968-9
        • ISBN: 978-3-540-64968-7
        • Internet Resource: DOI:10.1007/b71424
        • RefComment: VII, 320 pages.
        • {uni_hamburg} Short: EINECS
        • Title: EINECS (European Inventory of Existing Commercial Chemical Substances)
        • Source: Official Journal of the European Communities
        • Volume: C 146 A (15.06.1990)
        • Page: 1
        • Year: 1990
        • Internet Resource: //ecb.jrc.ec.europa.eu/esis/index.php?PGM=ein
        • Publish_Date: 1990/06/15
          • 6074-84-6 H95353 Tantalum(V) ethoxide 乙醇鉭(V)

          化學屬性

          Refractive indexn20/D 1.487(lit.)
          SolubilityDecomposes in water. Soluble in organic solvents
          TSCAYes
          Mol. FormulaC10H25O5Ta
          Mol. Weight406.25
          Density1.56
          Flash Point87°F
          Appearance yellow liq. colorless to yellow liq.
          Stabilitymoisture sensitive
          Boiling Point155 °C at 0.01 mmHg
          Melting Point21 °C

          *以(yi)上化合(he)物性質及應用等信息僅供(gong)參考